AES and HRTEM study of an a-SiNx: H/W/WSix/a-SiNx: H multilayer structure realized by PEVCD - Université de Montpellier
Article Dans Une Revue Surface and Interface Analysis Année : 1994

AES and HRTEM study of an a-SiNx: H/W/WSix/a-SiNx: H multilayer structure realized by PEVCD

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Chimie

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hal-01737457 , version 1 (19-03-2018)

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C. Monteil, J. Durand, R. Berjoan, B. Cros, J. Martinez. AES and HRTEM study of an a-SiNx: H/W/WSix/a-SiNx: H multilayer structure realized by PEVCD. Surface and Interface Analysis, 1994, 21 (12), pp.823 - 829. ⟨10.1002/sia.740211202⟩. ⟨hal-01737457⟩
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