Lateral porous silicon interferometric transducer for on-chip flow-through sensing applications

Yingning He; Douglas Silva de Vasconcellos; David Bourrier; Kata Hajdu; Jean-Olivier Durand; Frédérique Cunin; Véronique Bardinal; Thierry Leichlé

doi:10.1016/j.sna.2021.113089

Article dans une revue

Lateral porous silicon interferometric transducer for on-chip flow-through sensing applications

Yingning He ¹ Douglas Silva de Vasconcellos ¹ David Bourrier ² Kata Hajdu ¹ Jean-Olivier Durand ³ Frédérique Cunin ³ Véronique Bardinal ⁴ Thierry Leichlé ^{5, 1, 6}

1 LAAS-MEMS - Équipe Microsystèmes électromécaniques

LAAS - Laboratoire d'analyse et d'architecture des systèmes

2 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique

LAAS - Laboratoire d'analyse et d'architecture des systèmes

3 ICGM ICMMM - Institut Charles Gerhardt Montpellier - Institut de Chimie Moléculaire et des Matériaux de Montpellier

4 LAAS-MICA - Équipe MICrosystèmes d'Analyse

LAAS - Laboratoire d'analyse et d'architecture des systèmes

5 Georgia Institute of Technology [Atlanta]

6 Georgia Tech Lorraine [Metz]

Abstract : Most porous silicon-based interferometric sensors targeting biosensing applications consist of vertical porous silicon layers created into a silicon wafer by electrochemical anodization and operate in a flow-over configuration. In this work, we present an alternative porous silicon interferometer based on porous silicon with horizontally oriented pores. This architecture permits the integration of flow-through porous silicon membranes within planar microfluidics. Fourier-transform infrared spectroscopy was used to obtain interference spectra from fabricated lateral porous silicon membranes and red shifts were observed upon filling microfluidic chips integrating the porous membranes with solvents of higher optical indices. This work proves that lateral porous silicon membranes are typical Fabry-Pérot interferometers with a sensitivity of more than 150 nm/RIU and a limit of detection less than 10−3 RIU, that is comparable to vertical porous silicon layers. Moreover, we have conducted simulation studies showing that the addition of Bragg mirrors on the membranes results in spectra with narrower fringes and lateral porous silicon interferometers with improved performances. After appropriate biofunctionalization of the porous silicon surface, lateral porous silicon membrane interferometers should offer alternative solutions for the development of porous silicon flow-through biosensors monolithically integrated on-chip.

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Article dans une revue

Domaine :

Chimie

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https://hal.umontpellier.fr/hal-03377090
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Soumis le : jeudi 14 octobre 2021 - 06:25:39
Dernière modification le : mardi 4 janvier 2022 - 05:57:11

Lateral porous silicon interferometric transducer for on-chip flow-through sensing applications

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