ZnO coated fiber optic microsphere sensor for the enhanced refractive index sensing - Université de Montpellier Accéder directement au contenu
Article Dans Une Revue Sensors and Actuators A: Physical Année : 2019

ZnO coated fiber optic microsphere sensor for the enhanced refractive index sensing

Résumé

Optical fiber-based sensors are expected to become key components in the control of industrial processes, and the tuning and the enhancement of their sensing properties are crucial for the further development of this technology. Atomic Layer Deposition (ALD), a vapor phase technique allowing for the deposition of conformal thin films, is particularly suited for the deposition of controllable thin films on challenging substrates. In this work, we report the tuning of fiber-optic microsphere sensors using an ALD process of zinc oxide (ZnO) based on diethylzinc (DEZ) and H2O at 90°C. Nanolayers of 50 and 100 nm were deposited on the fiber-optic microspheres sensors, using 250 and 500 ALD cycles respectively. The fabricated samples were characterized using Scanning Electron Microscopy (SEM), and the spectral responses of the devices were investigated theoretically and experimentally, by measuring the refractive index of different oils. It has been found that the biocompatible ZnO functional nanocoatings of the fiber-optic microsphere sensors allowed for a wider measurement range of refractive indexes, opening up new prospects for fiberbased sensing devices.
Fichier principal
Vignette du fichier
Sensors & Actuators A. Physical, 2019, 298, 111594.pdf (1.1 Mo) Télécharger le fichier
Origine : Fichiers produits par l'(les) auteur(s)

Dates et versions

hal-03243316 , version 1 (31-05-2021)

Identifiants

Citer

Marzena Hirsch, Paulina Listewnik, Przemysław Struk, Matthieu Weber, Mikhael Bechelany, et al.. ZnO coated fiber optic microsphere sensor for the enhanced refractive index sensing. Sensors and Actuators A: Physical , 2019, 298, pp.111594. ⟨10.1016/j.sna.2019.111594⟩. ⟨hal-03243316⟩
21 Consultations
198 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More