Optical and structural properties of Al 2 O 3 /ZnO nanolaminates deposited by ALD method - Université de Montpellier
Article Dans Une Revue physica status solidi (c) Année : 2014

Optical and structural properties of Al 2 O 3 /ZnO nanolaminates deposited by ALD method

Résumé

We report on the investigation of optical and structural properties of Al2O3/ZnO nanolaminates. The nanolaminates were deposited on Si and glass substrates by Atomic layer deposition method. Structural properties of nanolaminates were studied by SEM, GIXRD, and AFM. Optical characterization was performed by transmittance and photoluminescence spectroscopy. Complex analysis of monolayer properties was done by ellipsometry. Optical constants for Al2O3 and ZnO monolayer were calculated.

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Chimie

Dates et versions

hal-01788796 , version 1 (09-05-2018)

Identifiants

Citer

Adib Abou Chaaya, Roman Viter, Ieva Baleviciute, Mikhael Bechelany, Arunas Ramanavicius, et al.. Optical and structural properties of Al 2 O 3 /ZnO nanolaminates deposited by ALD method. physica status solidi (c), 2014, 11 (9-10), pp.1505 - 1508. ⟨10.1002/pssc.201300607⟩. ⟨hal-01788796⟩
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