Ordered arrays of epitaxial silicon nanowires produced by nanosphere lithography and chemical vapor deposition - Université de Montpellier
Article Dans Une Revue Journal of Crystal Growth Année : 2010

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hal-01696894 , version 1 (30-01-2018)

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Damiana Lerose, Mikhael Bechelany, Laëtitia Philippe, Johann Michler, Silke Christiansen. Ordered arrays of epitaxial silicon nanowires produced by nanosphere lithography and chemical vapor deposition. Journal of Crystal Growth, 2010, 312 (20), pp.2887 - 2891. ⟨10.1016/j.jcrysgro.2010.07.023⟩. ⟨hal-01696894⟩
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