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Article Dans Une Revue Nanotechnology Année : 2024

Long indium-rich InGaAs nanowires by SAG-HVPE

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Abstract We demonstrate the selective area growth of InGaAs nanowires (NWs) on GaAs (111)B substrates using hydride vapor phase epitaxy (HVPE). A high growth rate of more than 50 μ m h −1 and high aspect ratio NWs were obtained. Composition along the NWs was investigated by energy dispersive x-ray spectroscopy giving an average indium composition of 84%. This is consistent with the composition of 78% estimated from the photoluminescence spectrum of the NWs. Crystal structure analysis of the NWs by transmission electron microscopy indicated random stacking faults related to zinc-blende/wurtzite polytypism. This work demonstrates the ability of HVPE for growing high aspect ratio InGaAs NW arrays.
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hal-04465785 , version 1 (19-02-2024)

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Emmanuel Chereau, Gabin Grégoire, Geoffrey Avit, Thierry Taliercio, Philipp Staudinger, et al.. Long indium-rich InGaAs nanowires by SAG-HVPE. Nanotechnology, 2024, 35 (19), pp.195601. ⟨10.1088/1361-6528/ad263a⟩. ⟨hal-04465785⟩
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