Extended charge layers in metal-oxide-semiconductor nanocapacitors revealed by <i>Operando</i> electron holography - Interférometrie In-situ, Instrumentation pour la Microscopie Electronique Access content directly
Journal Articles Physical Review Letters Year : 2022

Extended charge layers in metal-oxide-semiconductor nanocapacitors revealed by Operando electron holography

Abstract

The metal-oxide-semiconductor (MOS) capacitor is one of the fundamental electrical components used in integrated circuits. While much effort is currently being made to integrate new dielectric or ferroelectric materials, capacitors of silicon dioxide on silicon remain the most prevalent. It is perhaps surprising therefore that the electric field within a such capacitor has never been measured, or mapped out, at the nanoscale. Here we present results from operando electron holography experiments showing the electric potential across a working MOS nanocapacitor with unprecedented sensitivity and reveal unexpected charging of the dielectric material bordering the electrodes.
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hal-03787333 , version 1 (24-09-2022)

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C. Gatel, R. Serra, K. Gruel, A. Masseboeuf, L. Chapuis, et al.. Extended charge layers in metal-oxide-semiconductor nanocapacitors revealed by Operando electron holography. Physical Review Letters, 2022, 129 (13), pp.137701. ⟨10.1103/physrevlett.129.137701⟩. ⟨hal-03787333⟩
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